LMI Seminar: Non-invasive nanoscale cross-sectional XUV imaging

Institut für Optik und Quantenelektronik, Friedrich-Schiller-Universität Jena, Germany

17 May 2022, 11:30 
Engineering Classroom Building, Auditorium 011 
LMI Seminar



I will discuss nanoscale imaging in the extreme ultraviolet (XUV) spectral region using high-harmonics produced by femtosecond laser radiation. As opposed to other XUV imaging approaches, our scheme can exploit the entire high-harmonic spectrum. In fact, our method is the XUV incarnation of optical coherence tomography, albeit vastly differently implemented due to the challenges of XUV optics. Thus, it is referred to as XUV coherence tomography, XCT.


A particularly relevant application of XCT for the spectral range up to 100 eV are silicon-based samples. We have demonstrated depth resolutions of 20 nm and very high sensitivities. Buried oxide layers of a thickness of a few nanometers could be detected as well as buried monolayers of graphene. It is even possible to identify the material encapsulated in silicon and determine also properties like layer roughness without destroying the sample. A unique perspective is ultrafast imaging






Tel Aviv University makes every effort to respect copyright. If you own copyright to the content contained
here and / or the use of such content is in your opinion infringing, Contact us as soon as possible >>